- Home
- Equipment
Refine by
Nanochem Purifilter Environmental Equipment & Supplies
1 equipment items found
Distributed by:Chrysalis Scientific Technologies Inc. based inBurlington, ONTARIO (CANADA)
The NANOCHEM PuriFilter is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter is installed. The valve also reduces leakage of any residual hazardous gases when the purifier ...
